FEI Titan 80-300 STEM

Marc Heggen, Martina Luysberg, Karsten Tillmann

Abstract


The FEI Titan 80-300 STEM is a scanning transmission electron microscope equipped with a field emission electron gun, a three-condenser lens system, a monochromator unit, and a Cs probe corrector (CEOS), a post-column energy filter system (Gatan Tridiem 865 ER) as well as a Gatan 2k slow scan CCD system. Characterised by a STEM resolution of 80 pm at 300 kV, the instrument was one of the first of a small number of sub-ångström resolution scanning transmission electron microscopes in the world when commissioned in 2006.

References


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Cite article as: Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons (ER-C) et al. (2016). FEI Titan 80-300 STEM. Journal of large-scale research facilities, 2, A42. http://dx.doi.org/10.17815/jlsrf-2-67




DOI: http://dx.doi.org/10.17815/jlsrf-2-67

URN: http://nbn-resolving.de/urn:nbn:de:0001-jlsrf-2-67-4

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