FEI Helios NanoLab 460F1 FIB-SEM

Abstract

The FEI Helios NanoLab 460F1 is a highly advanced dual beam FIB-SEM platform for imaging and analytical measurements, transmission electron microscopy (TEM) sample and atom probe (AP) needle preparation, process development and process control. For these purposes, the FEI Helios NanoLab 460F1 combines an Elstar^TM UC technology electron column for high-resolution and high material contrast imaging with the high-performance Tomahawk^TM ion column for fast and precise sample preparation. The FEI Helios NanoLab 460F1 is additionally equipped with the MultiChem^TM gas delivery system, an EasyLift^TM nanomanipulator, a cooling trap, an inert gas transfer (IGT) holder loadlock, a quick loader, a FlipStage 3^TM, an EDX-System and an STEM III detector. This instrument is one of the few dual beam systems which combine an IGT holder loadlock with a FlipStage 3+^TM EasyLift^TM nanomanipulator. Typical examples of use and technical specifications for the instrument are given below.