FEI Helios NanoLab 400S FIB-SEM

Abstract

The FEI Helios NanoLab400S FIB-SEM is one of the world's most advanced DualBeam^TM focused ion beam (FIB) platforms for transmission electron microscopy (TEM) sample preparation, scanning electron microscopy (SEM) imaging and analysis in semiconductor failure analysis, process development and process control. The FEI Helios NanoLab400S FIB-SEM combines an Elstar^TM electron column for high-resolution and high-contrast imaging with a high-performance Sidewinder^M ion column for fast and precise cross sectioning. The FEI Helios NanoLab ^M 400S is optimised for high throughput high-resolution S/TEM sample preparation, SEM imaging and energy dispersive X-ray analysis. Its exclusive FlipStage^TM and in situ STEM detector can flip from sample preparation to STEM imaging in seconds without breaking vacuum or exposing the sample to the environment. Platinum gas chemistry is the preferred metal deposition when a high deposition rate and precision of the deposition are required. Carbon deposition can be chosen as well. The system additionally allows for spatially resolved compositional analysis using the attached EDAX Genesis XM 4i X-ray microanalysis system.