HNF - Helmholtz Nano Facility
DOI:
https://doi.org/10.17815/jlsrf-3-158Abstract
The Helmholtz Nano Facility (HNF) is a state-of-the-art cleanroom facility. The cleanroom has ~1100 m2 with cleanroom classes of DIN ISO 1-3. HNF operates according to VDI DIN 2083, Good Manufacturing Practice (GMP) and aquivalent to Semiconductor Industry Association (SIA) standards. HNF is a user facility of Forschungszentrum Jülich and comprises a network of facilities, processes and systems for research, production and characterization of micro- and nanostructures. HNF meets the basic supply of micro- and nanostructures for nanoelectronics, fluidics. micromechanics, biology, neutron and energy science, etc..
The task of HNF is rapid progress in nanostructures and their technology, offering efficient access to infrastructure and equipment. HNF gives access to expertise and provides resources in production, synthesis, characterization and integration of structures, devices and circuits. HNF covers the range from basic research to application oriented research facilitating a broad variety of different materials and different sample sizes.
References
Gasparyan, F., Khondkaryan, H., Arakelyan, A., Zadorozhnyi, I., Pud, S. & Vitusevich, S. (2016). Doublegated si nw fet sensors: Low-frequency noise and photoelectric properties. Journal of Applied Physics, 120(6), 064902. http://dx.doi.org/10.1063/1.4960704
Grünberger, A., Paczia, N., Probst, C., Schendzielorz, G., Eggeling, L., Noack, S., . . . Kohlheyer, D. (2012). A disposable picolitre bioreactor for cultivation and investigation of industrially relevant bacteria on the single cell level. Lab Chip, 12, 2060-2068. http://dx.doi.org/10.1039/C2LC40156H
Günel, H. Y., Borgwardt, N., Batov, I. E., Hardtdegen, H., Sladek, K., Panaitov, G., . . . Schäpers, T. (2014). Crossover from Josephson Effect to Single Interface Andreev Reflection in Asymmetric Superconductor/ Nanowire Junctions. Nano Letters, 14(9), 4977-4981. http://dx.doi.org/10.1021/nl501350v
Heedt, S., Prost, W., Schubert, J., Grützmacher, D., & Schäpers, T. (2016). Ballistic Transport and Exchange Interaction in InAs Nanowire Quantum Point Contacts. Nano Letters, 16(5), 3116-3123. http://dx.doi.org/10.1021/acs.nanolett.6b00414
Kireev, D., Seyock, S., Ernst, M., Maybeck, V.,Wolfrum, B., & Offenhäusser, A. (2017). Versatile Flexible Graphene Multielectrode Arrays. Biosensors, 7, 1. http://dx.doi.org/10.3390/bios7010001
Luong, G. V., Narimani, K., Tiedemann, A. T., Bernardy, P., Trellenkamp, S., Zhao, Q. T., & Mantl, S. (2016). Complementary Strained Si GAA Nanowire TFET Inverter With Suppressed Ambipolarity. IEEE Electron Device Letters, 37(8), 950-953. http://dx.doi.org/10.1109/LED.2016.2582041
Pud, S., Li, J., Sibiliev, V., Petrychuk, M., Kovalenko, V., Offenhäusser, A., & Vitusevich, S. (2014). Liquidand Back Gate Coupling Effect: Toward Biosensing with Lowest Detection Limit. Nano Letters, 14(2), 578-584. http://dx.doi.org/10.1021/nl403748x
Verbiest, G. J., Xu, D., Goldsche, M., Khodkov, T., Barzanjeh, S., von den Driesch, N., . . . Stampfer, C. (2016). Tunable mechanical coupling between driven microelectromechanical resonators. Applied Physics Letters, 109(14), 143507. http://dx.doi.org/10.1063/1.4964122
Cite article as: Forschungszentrum Jülich GmbH . (2017). HNF - Helmholtz Nano Facility. Journal of large-scale research facilities, 3, A112. http://dx.doi.org/10.17815/jlsrf-3-158
Downloads
Published
Issue
Section
URN
License
Copyright (c) 2017 Journal of large-scale research facilities JLSRF
This work is licensed under a Creative Commons Attribution 4.0 International License.
Submission of an article authorizes Forschungszentrum Jülich to publish the accepted version of the article under a CC BY 4.0 Creative Commons Licence Creative Commons-Lizenz CC-BY 4.0. No article processing charges or submission fees are involved.
