FEI Titan 80-300 TEM

Authors

  • Andreas Thust
  • Juri Barthel
  • Karsten Tillmann Ernst Ruska-Centre (ER-C) Jülich Research Centre 52425 Jülich Germany

DOI:

https://doi.org/10.17815/jlsrf-2-66

Abstract

The FEI Titan 80-300 TEM is a high-resolution transmission electron microscope equipped with a field emission gun and a corrector for the spherical aberration (CS) of the imaging lens system. The instrument is designed for the investigation of a wide range of solid state phenomena taking place on the atomic scale, which requires true atomic resolution capabilities. Under optimum optical settings of the image CS-corrector (CEOS CETCOR) the point-resolution is extended up to the information limit of well below 100 pm with 200 keV and 300 keV electrons. A special piezo-stage design allows ultra-precise positioning of the specimen in all 3 dimensions. Digital images are acquired with a Gatan 2k x 2k slow-scan charged coupled device camera.

References

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Nature Materials, 13(11), 1044-1049. http://dx.doi.org/10.1038/nmat408

Thust, A., Overwijk, M., Coene, W., & Lentzen, M. (1996). Numerical correction of lens aberrations in phase-retrieval HRTEM. Ultramicroscopy, 64(1–4), 249 - 264. http://dx.doi.org/10.1016/0304-3991(96)00022-8


Cite article as: Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons. (2016). FEI Titan 80-300 TEM. Journal of large-scale research facilities, 2, A41. http://dx.doi.org/10.17815/jlsrf-2-66

Published

2016-01-29

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